FUTURREX NEGATIVE RESIST NR9-250P
Description
? Negative Resist NR9-250P is a negative tone photoresist designed for 366 nm
wavelength exposure,
using tools such as wafer steppers, scanning projection aligners, proximity printers
contact printers.
? These are the advantages of NR9-250P over other resists: - superior resolution capability of less than 0.5 μm - fast develop time - fast photospeed - superior adhesion capability - easy resist removal in Resist Remover RR4 - shelf life exceeding 3 years at room temperature storage.
? The formulation processing of NR9-250P were designed with regard to occupational
environmental safety. The principal solvent in NR9-250P is cyclohexanone
development of NR9-250P is accomplished in a basic water solution.
Properties
? Solids content (%) 9-12
? Principal solvent cyclohexanone
? Appearance light yellow liquid
? Coating characteristic very uniform,
striation free
? Film thickness after 150°C hotplate bake for 60 s
Coating spin speed, 40 s spin (rpm): (nm)
800 400-600
3000 220-280
? Sensitivity at 365 nm exposure wavelength (mJ/cm2 for 1 μm thick film) 21
? Guaranteed shelf life at 25°C storage (years) 3
